We have explored the operation and characteristics of a planar magnetron discharge system with central on-axis electron injection and a reflector electrode. The diameter of the magnetron copper target was 125 mm; the operating gas was argon and the pressure range 2 × 10⁻⁴ – 2 × 10⁻³ Torr. To increase the efficiency of electron injection, a negatively-biased reflecting electrode was located on the system axis. We have investigated the effect of the reflector electrode on the characteristics of the magnetron discharge, as a function of reflector shape, cross-sectional area, electrical bias, and distance from the target. It is shown that the simultaneous use of central injection of electrons with their acceleration across the cathode layer of the magnetron discharge, and a cone-shaped reflector electrode allows the current to be increased and the operating pressure to be decreased by a factor of several for a fixed magnetron discharge voltage.

我们已经探索了具有中心同轴电子注入和反射器电极的平面磁控管放电系统的操作和特性。磁控铜靶的直径为125mm；操作气体为氩气，压力范围为 2 × 10 ^-4 – 2 × 10 ^-3 托。为了提高电子注入的效率，负偏置反射电极位于系统轴上。我们已经研究了反射器电极对磁控管放电特性的影响，作为反射器形状、横截面积、电偏置和与目标的距离的函数。结果表明，同时使用电子的中心注入及其加速穿过磁控管放电的阴极层，以及锥形反射电极允许电流增加和工作压力降低几倍，对于固定的磁控管放电电压。