Novel gas aggregation cluster source based on post magnetron,Plasma Processes and Polymers

当前位置： X-MOL 学术 › Plasma Processes Polym. › 论文详情

Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)

Novel gas aggregation cluster source based on post magnetron
Plasma Processes and Polymers ( IF 2.9 ) Pub Date : 2021-07-26 , DOI: 10.1002/ppap.202100068
Daniil Nikitin ₁ , Jan Hanuš ₁ , Pavel Pleskunov ₁ , Zdeněk Krtouš ₁ , Suren Ali‐Ogly ₁ , Renata Tafiichuk ₁ , Kateryna Biliak ₁ , Mariia Protsak ₁ , Jan Valter ₂ , Jiři Vyskočil ₂ , Andrei Choukourov ₁ , Hynek Biederman ₁

Affiliation

In this communication, a new gas aggregation cluster source is introduced equipped with post cylindrical magnetron. The rotation of magnetic circuit improves the usage of cylindrical copper target in terms of its homogenous consumption. Copper nanoparticles were successfully synthesized. Their deposition rate fluctuates at slow rotations of magnetic circuit. Cyclic trapping and release of nanoparticles from electrostatic capture zones are likely responsible for this effect. The instabilities are not observed at higher rotation speeds. The argon flow is found to be very complex within the cluster source; however, it seems crucial for its operation. The efficiency of transport of nanoparticles and their size increase with gas flow. The highest values of deposition rate of around 19 mg/h are obtained.

中文翻译：

基于后磁控管的新型气体聚集簇源

在这次交流中，介绍了一种配备柱状磁控管的新型气体聚集簇源。磁路的旋转提高了圆柱形铜靶在其均质消耗方面的使用。成功合成了铜纳米粒子。它们的沉积速率随着磁路的缓慢旋转而波动。从静电捕获区循环捕获和释放纳米颗粒可能是造成这种效应的原因。在更高的旋转速度下没有观察到不稳定性。发现簇源内的氩气流非常复杂；然而，它似乎对其运作至关重要。纳米颗粒的传输效率和它们的尺寸随着气流的增加而增加。获得了大约 19 毫克/小时的沉积速率的最高值。

更新日期：2021-09-06

点击分享查看原文

点击收藏

阅读更多本刊最新论文本刊介绍/投稿指南11