The sensitivity and resolution of the planar magnetic inductive sensors are enhanced by optimizing the gap between the upper and lower magnetic films. The tradeoff between the effect of the effective magnetic permeability and magnetic leakage of the magnetic films on the inductance of the sensor produces a gap that optimizes the sensor performance. This conclusion is verified theoretically and experimentally with the fabrication and testing of planar magnetic inductive sensors with given dimensions of magnetic films and planar spiral coil. From the analysis, the optimal gap ( g) for our manufactured sensors with given dimensions is four times the magnetic film thickness ( t). Experimentally, when g/t=4, the inductance value, inductance ratio, and voltage sensitivity of sensors are all the largest. The sensitivity and resolution of the sensor with g/t=4 are 1.81 mV/Oe and 50.23 nT at 500 kHz. Compared with the prototype whose magnetic films and planar coil are stacked tightly together, the sensitivity is increased by 43.72% and the resolution is improved by 33.51%. It is universally applicable that there is a gap that optimizes the performance of the planar magnetic inductive sensor.

中文翻译：

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通过优化磁性薄膜之间的间隙来提高平面磁感应传感器的灵敏度和分辨率


通过优化上下磁膜之间的间隙，提高了平面磁感应传感器的灵敏度和分辨率。磁性薄膜的有效磁导率和漏磁对传感器电感的影响之间的权衡产生了优化传感器性能的间隙。通过给定尺寸磁性薄膜和平面螺旋线圈平面磁感应传感器的制作和测试，从理论上和实验上验证了这一结论。根据分析，我们制造的给定尺寸传感器的最佳间隙 (g) 是磁膜厚度 (t) 的四倍。实验上，当g/t=4时，传感器的电感值、电感比、电压灵敏度均最大。 g/t=4 时传感器的灵敏度和分辨率在 500 kHz 时为 1.81 mV/Oe 和 50.23 nT。与磁性薄膜和平面线圈紧密堆叠在一起的原型相比，灵敏度提高了43.72%，分辨率提高了33.51%。存在间隙优化平面磁感应传感器的性能是普遍适用的。