In this article, we replace the Z axis of the piezotube of a conventional Ultrahigh-Vacuum (UHV) Scanning Tunneling Microscope (STM) with a one-degree-of-freedom Microelectromechanical-System (MEMS) nanopositioner. As a result, a hybrid system is realized in which motions in the XY plane are carried out by the piezotube, while the MEMS device performs the Z-axis positioning with a smaller footprint and higher sensitivity. With the proposed system and a feedback loop, STM imaging is conducted on an H-passivated Si (100)-2$\times$1 sample in a UHV condition, demonstrating that this on-chip STM is conducive to atomic precision scanning tunneling microscopy.

中文翻译：

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使用集成到商用超高真空 STM 系统中的片上扫描隧道显微镜进行原子精密成像

在本文中，我们将传统超高真空 (UHV) 扫描隧道显微镜 (STM) 的压电管的 Z 轴替换为单自由度微机电系统 (MEMS) 纳米定位器。因此，实现了一种混合系统，其中压电管在 XY 平面上执行运动，而 MEMS 设备以更小的占地面积和更高的灵敏度执行 Z 轴定位。使用所提出的系统和反馈回路，STM 成像是在 H 钝化的 Si (100)-2 上进行的$\times$1 样品在 UHV 条件下，表明这种片上 STM 有利于原子精度扫描隧道显微镜。