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Design of MEMS microphone protective membranes for continuous outdoor applications
Applied Acoustics ( IF 3.4 ) Pub Date : 2021-07-22 , DOI: 10.1016/j.apacoust.2021.108304
T. Wenzel 1 , R. Rettig 1
Affiliation  

Although most modern communication devices use of multiple MEMS-based microphones, their application in continuous-outdoor applications has so far been very limited. Specifically, for constant operation in humid, rainy environments, additional weather protection of the MEMS element is required. Thus, a protective 3D-printed membrane has been developed for a multichannel outdoor application to monitor noise emissions. The acoustic characteristics of the protection are assessed analytically, using simulations and experimentally in this paper. The vibrational modes are identified in the simulation, which can be used to implement practically usable membranes. The measurements performed are compared to simulation results. Deviations are explained based on different material parameters of the membrane, model assumptions and manufacturing processes. 3D-printed membranes have a different material structure which is more flexible than solid elements and need adapted simulations inputs. Running field tests show that the membranes developed can adequately protect MEMS-based microphones for several months with only a minor impact on the system’s acoustic performance. This paper proves that an adequate analytical, simulation and practical implementation is a cost effective and adaptable approach for outdoor noise monitoring systems.



中文翻译:

用于连续户外应用的 MEMS 麦克风保护膜的设计

尽管大多数现代通信设备使用多个基于 MEMS 的麦克风,但它们在连续户外应用中的应用迄今为止非常有限。具体来说,为了在潮湿、多雨的环境中持续运行,需要对 MEMS 元件进行额外的天气保护。因此,已经开发出一种保护性 3D 打印膜,用于多通道户外应用以监测噪声排放。在本文中,使用模拟和实验对保护的声学特性进行了分析评估。在模拟中识别振动模式,可用于实现实际可用的膜。将执行的测量与模拟结果进行比较。根据膜的不同材料参数、模型假设和制造工艺来解释偏差。3D 打印膜具有不同的材料结构,它比实体元件更灵活,需要适应的模拟输入。运行现场测试表明,开发的膜可以充分保护基于 MEMS 的麦克风数月,而对系统的声学性能影响很小。本文证明,充分的分析、模拟和实际实施对于室外噪声监测系统来说是一种具有成本效益和适应性的方法。

更新日期:2021-07-23
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