Abstract

Polishing of oxide film on ELID wheel surface has an important effect on grinding surface quality. First, electrochemical reaction of oxide film was researched, and transformation mechanism of component of oxide film under grinding temperature was proposed. The phase compositions, generation and transformation mechanism of the α-F₂O₃ in the oxide film was measured by XRD, XPS, FITR. The microstructure of oxide film was observed by using TEM. Researched results show, α-F₂O₃ in the oxide film have been found, the content and transformation of α-F₂O₃ are closely related to the grinding temperature. Iron oxide in oxide film is transformed into α-F₂O₃ with temperature gradually, and nano grain α-F₂O₃ with high purity, good crystal lattice, and grain size 10–80 nm is formed when grinding temperature is 600 °C. TEM analyzed shows, the grain in oxide film is spherality, and film structure is formed with multiple particles α-F₂O₃. The film structure reveals that polishing mechanism of oxide film isn’t independent act of single particle, but is cooperative behavior of multiple particles α-F₂O₃.

摘要

ELID砂轮表面氧化膜的抛光对磨削表面质量有重要影响。首先，研究了氧化膜的电化学反应，提出了氧化膜成分在磨削温度下的转变机理。采用XRD、XPS、FITR等手段测定了氧化膜中α-F ₂ O ₃的相组成、生成和转变机理。使用TEM观察氧化膜的微观结构。研究结果表明，α-F ₂ Ó ₃在氧化膜已发现，α-F中的含量和转化₂ ö ₃密切相关的磨削温度。氧化膜中的氧化铁转化为α-F ₂ O₃随着温度逐渐升高，磨削温度为600℃时，形成纯度高、晶格良好、粒径10-80nm的纳米晶粒α-F ₂ O ₃。TEM分析表明，氧化膜中的晶粒为球形，膜结构由多个粒子α-F ₂ O _{3 形成}。膜结构表明氧化膜的抛光机制不是单个粒子的独立作用，而是多个粒子α-F ₂ O _{3 的}协同行为。