In this study, ZrO₂ coatings with different thicknesses were grown by the electron beam evaporation technique. The crystalline structure was studied by XRD analysis which suggested the tetragonal and monoclinic phases for ZrO₂ coatings. Additionally, the film thickness slightly enhanced the crystallinity. The surface morphology and fractal features were analyzed using Scanning Electron Microscopy (SEM). The surface statistical parameters and the fractal geometry were employed to analyze the impact of the coating thickness and homogeneity on the morphology of the films. The statistical processing and fractal dimension revealed variations in the morphology parameters due to the electron beam evaporation method applied for different thicknesses of samples. Based on these results, it can be concluded that the surface microtexture and fractal dimension area correlated with the thickness and homogeneity of the crystalline structure.

在这项研究中，不同厚度的ZrO ₂涂层是通过电子束蒸发技术生长的。通过XRD分析研究晶体结构，表明ZrO ₂为四方相和单斜相涂料。此外，薄膜厚度略微提高了结晶度。使用扫描电子显微镜（SEM）分析表面形态和分形特征。表面统计参数和分形几何被用来分析涂层厚度和均匀性对薄膜形貌的影响。由于应用于不同厚度样品的电子束蒸发方法，统计处理和分形维数揭示了形态参数的变化。基于这些结果，可以得出结论，表面微观纹理和分形维数区域与晶体结构的厚度和均匀性相关。