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The effect of thickness and film homogeneity on the optical and microstructures of the ZrO2 thin films prepared by electron beam evaporation method
Optical and Quantum Electronics ( IF 3.3 ) Pub Date : 2021-07-22 , DOI: 10.1007/s11082-021-03079-4
Reza Shakoury 1 , Negin Talebani 1 , Amir Zelati 2 , Ştefan Ţălu 3 , Ali Arman 4 , Saeed Mirzaei 5 , Azadeh Jafari 6, 7
Affiliation  

In this study, ZrO2 coatings with different thicknesses were grown by the electron beam evaporation technique. The crystalline structure was studied by XRD analysis which suggested the tetragonal and monoclinic phases for ZrO2 coatings. Additionally, the film thickness slightly enhanced the crystallinity. The surface morphology and fractal features were analyzed using Scanning Electron Microscopy (SEM). The surface statistical parameters and the fractal geometry were employed to analyze the impact of the coating thickness and homogeneity on the morphology of the films. The statistical processing and fractal dimension revealed variations in the morphology parameters due to the electron beam evaporation method applied for different thicknesses of samples. Based on these results, it can be concluded that the surface microtexture and fractal dimension area correlated with the thickness and homogeneity of the crystalline structure.



中文翻译:

厚度和薄膜均匀性对电子束蒸发法制备的 ZrO2 薄膜光学和微观结构的影响

在这项研究中,不同厚度的ZrO 2涂层是通过电子束蒸发技术生长的。通过XRD分析研究晶体结构,表明ZrO 2为四方相和单斜相涂料。此外,薄膜厚度略微提高了结晶度。使用扫描电子显微镜(SEM)分析表面形态和分形特征。表面统计参数和分形几何被用来分析涂层厚度和均匀性对薄膜形貌的影响。由于应用于不同厚度样品的电子束蒸发方法,统计处理和分形维数揭示了形态参数的变化。基于这些结果,可以得出结论,表面微观纹理和分形维数区域与晶体结构的厚度和均匀性相关。

更新日期:2021-07-22
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