Highly reliable signal recording with low electrode-skin impedance makes the microneedle array electrode (MAE) a promising candidate for biosignal sensing. However, when used in long-term health monitoring for some incidental diseases, flexible microneedles with perfectly skin-tight fit substrates lead to sweat accumulation inside, which will not only affect the signal output but also trigger some skin allergic reactions. In this paper, a flexible MAE on a Miura-ori structured substrate is proposed and fabricated with two-directional in-plane bendability. The results from the comparison tests show enhanced performance in terms of (1) the device reliability by resisting peeling off of the metal layer from the substrate during the operation and (2) air ventilation, achieved from the air-circulating channels, to remove sweat. Bio-signal recordings of electrocardiography (ECG), as well as electromyography (EMG) of the biceps brachii, in both static and dynamic states, are successfully demonstrated with superior accuracy and long-term stability, demonstrating the great potential in health monitoring applications.

高度可靠的信号记录和低电极-皮肤阻抗使微针阵列电极（MAE）成为生物信号传感的有前途的候选者。然而，当用于一些偶发疾病的长期健康监测时，柔性微针与完美贴合的基材会导致汗液积聚在内部，这不仅会影响信号输出，还会引发一些皮肤过敏反应。在本文中，提出并制造了 Miura-ori 结构基板上的柔性 MAE，具有双向面内弯曲性。比较测试的结果表明，以下方面的性能得到了增强：(1) 通过在操作过程中防止金属层从基板上剥离来提高器件可靠性，以及 (2) 通过空气循环通道实现空气流通，以去除汗水。静态和动态状态下的心电图 (ECG) 以及肱二头肌肌电图 (EMG) 的生物信号记录已成功证明具有卓越的准确性和长期稳定性，展示了在健康监测应用中的巨大潜力。