A perforated micro-ring resonator (PMRR) on the flexible SU-8 substrate is proposed and theoretically demonstrated for detecting the refractive index (RI) and the pressure simultaneously. Once a perforation defect is introduced, the symmetric and the asymmetric standing wave modes (SWMs) are formed during the mode splitting. The energy distributions of the two SWMs are quite different so that the sensitivities of two modes toward the variation of RI and pressure applied to the device show differences. Through the numerical simulations, we obtain an RI sensitivity of 76.03 nm / RIU and a high pressure sensitivity of 5.37 pm / kPa for the symmetric SWM, and an RI sensitivity of 68.82 nm / RIU and a high pressure sensitivity of 6.15 pm / kPa for the asymmetric SWM. By solving a second-order sensitivity inverse matrix, we can measure the changes in RI and pressure simultaneously, thereby eliminating the influence of the strain-optical coupling effect in the field of flexible biosensor. Therefore, the proposed structure provides an approach to achieve flexible biosensing application in the real world and has tremendous potentiality in achieving multi-sensing applications.

中文翻译：

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基于两种驻波模式的穿孔微环谐振器同时测量折射率和压力

提出并在理论上证明了柔性 SU-8 基板上的穿孔微环谐振器 (PMRR) 可同时检测折射率 (RI) 和压力。一旦引入穿孔缺陷，对称和非对称驻波模式 (SWM) 就会在模式分裂期间形成。两种 SWM 的能量分布完全不同，因此两种模式对 RI 和施加到设备的压力变化的敏感性存在差异。通过数值模拟，我们获得了对称 SWM 的 RI 灵敏度为 76.03 nm / RIU 和高压灵敏度为 5.37 pm / kPa，以及 RI 灵敏度为 68.82 nm / RIU 和高压灵敏度为 6.15 pm / kPa。非对称 SWM。通过求解二阶灵敏度逆矩阵，我们可以同时测量RI和压力的变化，从而消除了柔性生物传感器领域中应变光耦合效应的影响。因此，所提出的结构提供了一种在现实世界中实现灵活的生物传感应用的方法，并且在实现多传感应用方面具有巨大的潜力。