Emerging non-imaging ultrasound applications, such as ultrasonic wireless power delivery to implantable devices and ultrasound neuromodulation, require wearable form factors, millisecond-range pulse durations and focal spot diameters approaching 100 μm with electronic control of its three-dimensional location. None of these are compatible with typical handheld linear array ultrasound imaging probes. In this work, we present a 4 mm × 5 mm 2D ultrasound phased array transmitter with integrated piezoelectric ultrasound transducers on complementary metal-oxide-semiconductor (CMOS) integrated circuits, featuring pixel-level pitch-matched transmit beamforming circuits which support arbitrary pulse duration. Our direct integration method enabled up to 10 MHz ultrasound arrays in a patch form-factor, leading to focal spot diameter of ∼200 μm, while pixel pitch-matched beamforming allowed for precise three-dimensional positioning of the ultrasound focal spot. Our device has the potential to provide a high-spatial resolution and wearable interface to both powering of highly-miniaturized implantable devices and ultrasound neuromodulation.

中文翻译：

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具有像素间距匹配波束形成功能的 CMOS 集成 2D 超声相控阵发射器


新兴的非成像超声应用，例如向植入式设备的超声无线供电和超声神经调节，需要可穿戴的外形尺寸、毫秒范围的脉冲持续时间和接近 100 μm 的焦点直径，并对其三维位置进行电子控制。这些都不与典型的手持式线性阵列超声成像探头兼容。在这项工作中，我们提出了一种 4 mm × 5 mm 2D 超声相控阵发射器，在互补金属氧化物半导体 (CMOS) 集成电路上集成压电超声换能器，具有支持任意脉冲持续时间的像素级节距匹配发射波束形成电路。我们的直接集成方法在贴片形状因子中实现了高达 10 MHz 的超声阵列，导致焦斑直径约为 200 μm，而像素节距匹配的波束形成允许超声焦斑的精确三维定位。我们的设备有潜力提供高空间分辨率和可穿戴接口，为高度小型化的植入设备和超声神经调节供电。