This article proposes an innovative viscosity sensor based on the thickness-shear vibration of stress compensated (SC)-cut quartz resonator. The thickness-shear mode is first analyzed and further studied with fluid-structure interaction between the resonator and the viscous fluid loading. The characteristic equation is derived based on the 3-D linear piezoelectric equations and solved for sensitivity analysis. Then laboratory experiment is carried out to validate the theory. To conduct the viscosity measurement, the SC-cut quartz resonator is integrated with a U-tube test fixture, which is designed and fabricated for sensor housing to avoid the influence of the mass of the fluid. The resonator is tested with various viscosities by tuning the ratio of glycerol/water mixture. Experiment results show consistency with the analytical solution, which together present an improved sensitivity of viscosity measurement by using SC-cut quartz resonator comparing to other resonator-based viscosity sensors. The proposed viscosity sensor is sensitive, accurate, and portable, and therefore can be applied to real-time, on-site measurement or sampling of fluidic samples.

中文翻译：

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用于动态液体粘度测量的 SC 切割石英谐振器。

本文提出了一种基于应力补偿 (SC) 切割石英谐振器的厚度剪切振动的创新粘度传感器。首先分析厚度-剪切模式，并通过谐振器和粘性流体载荷之间的流体-结构相互作用进行进一步研究。特征方程是基于 3-D 线性压电方程推导出来的，并求解用于灵敏度分析。然后进行实验室实验以验证该理论。为了进行粘度测量，SC-cut 石英谐振器与 U 形管测试夹具集成在一起，该夹具专为传感器外壳设计和制造，以避免流体质量的影响。通过调整甘油/水混合物的比例，用各种粘度测试谐振器。实验结果与解析解一致，与其他基于谐振器的粘度传感器相比，通过使用 SC 切割石英谐振器，它们共同提高了粘度测量的灵敏度。所提出的粘度传感器灵敏、准确且便携，因此可应用于流体样品的实时、现场测量或采样。