LiNbO3 (LN) or LiTaO3 (LT) thin plates bonded to quartz are novel types of layered substrates for temperature-compensated surface acoustic wave (TCSAW) devices. In SAW resonators with Al electrodes arranged on LT/quartz and LN/quartz substrates, improved temperature behavior due to opposite signs of temperature coefficients of frequency (TCF) in quartz substrates and LT or LN plates can be combined with high Q -factors if the quartz orientation is optimized. The quartz orientation areas that enabled high Q -factors were deduced from analyzing the quartz anisotropy and the characteristics of shear horizontally (SH) polarized waves were calculated in the optimal orientations as functions of the quartz cut angle and plate thickness. The simulation results illustrated by contour plots of the wave characteristics revealed the presence of zero lines on the plots demonstrating TCFs at resonant (TCFR) and antiresonant (TCFA) frequencies in both layered structures. The strong quartz anisotropy explained anomalous temperature behavior of SAW resonators and the existence of LT/quartz structures with TCFA = TCFR facilitating the design of SAW devices with improved thermal stability in the passband. In the LT/quartz structures, two TCFs vanished simultaneously at certain plate thickness and quartz orientation, while in the LN/quartz zero lines did not intersect but low TCF = -(10-20) ppm/°C combined with electromechanical coupling exceeding 18% were obtained numerically in some structures. The effect of inverting the propagation direction or cut angle in one of the combined materials on the wave characteristics was discussed and numerically estimated.

中文翻译：

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基于 LiNbO₃/石英和 LiTaO₃/石英基板的 SAW 谐振器的温度特性。

粘合到石英上的 LiNbO3 (LN) 或 LiTaO3 (LT) 薄板是用于温度补偿表面声波 (TCSAW) 器件的新型分层基板。在 LT/石英和 LN/石英基板上布置有 Al 电极的 SAW 谐振器中，由于石英基板和 LT 或 LN 板中频率温度系数 (TCF) 的符号相反，可以将改善的温度行为与高 Q 因子相结合，如果优化了石英取向。通过分析石英各向异性推导出具有高 Q 因子的石英取向区域，并在最佳取向中计算剪切水平 (SH) 偏振波的特性，作为石英切割角和板厚度的函数。由波特性等高线图说明的模拟结果显示，在这两种分层结构中，在谐振 (TCFR) 和反谐振 (TCFA) 频率下的 TCF 曲线上存在零线。强大的石英各向异性解释了 SAW 谐振器的异常温度行为以及 TCFA = TCFR 的 LT/石英结构的存在，这有助于设计具有改进的通带热稳定性的 SAW 器件。在LT/quartz结构中，两个TCFs在一定的板厚和石英取向下同时消失，而在LN/quartz零线不相交但低TCF = -(10-20) ppm/°C结合机电耦合超过18 % 是在某些结构中以数字形式获得的。