The new technologies of precise positioning systems with high speed and accuracy have been in the focus of attention in the recent years. In this research, a one-axis walker type inchworm piezomotor has been designed, modeled, manufactured and characterized. Simple design, simple manufacturing and assembly processes, low manufacturing cost and also high speed and stroke are advantages of this piezomotor. This system consists of three piezoelectric actuators, which installed into the clamps and feeder sets, and a guideway. The geometrical parameters with a high impact on the stiffness have been realized and modeled by the finite element method to ensure the proper functioning of the piezomotor. The motor dimensions are 55 × 23.1 × 15 mm³ which can provide a large movement range inside the guideway. The simulation analysis and experimental tests have been carried out to characterize the piezomotor. Based on the shape mode analysis, the maximum operating frequency of the piezomtor has been determined. Also, the Von-Mises stress analysis has been employed to predict the structural behavior of the motor. Finally, the experimental tests have been conducted to illustrate the piezomotor characteristics such as step pitch, speed, and operating frequency.

近年来，高精度、高速度的精准定位系统新技术成为人们关注的焦点。在这项研究中，设计、建模、制造和表征了一种单轴助行器型尺蠖压电电机。设计简单，制造和组装过程简单，制造成本低，速度和行程高是这种压电电机的优点。该系统由安装在夹具和进料器组中的三个压电致动器和一个导轨组成。对刚度有很大影响的几何参数已通过有限元方法实现和建模，以确保压电电机的正常运行。电机尺寸为 55 × 23.1 × 15 mm ³可在导轨内提供较大的运动范围。已经进行了模拟分析和实验测试来表征压电电机。基于形状模式分析，确定了压电体的最大工作频率。此外，Von-Mises 应力分析已被用于预测电机的结构行为。最后，进行了实验测试以说明压电电机的特性，例如步距、速度和工作频率。