A Micro-Electro-Mechanical-System (MEMS) resonant vacuum gauge (RVG) based on the electrostatic nonlinearity for low vacuum measurement was introduced. Different natural resonance modes of the sensing unit were driven for vacuum measurement. There were three modes driven under different pressure to measure the relationships between resonance frequency and gas pressure, including the second-order resonant mode (the second mode in short), the third mode and the fourth mode. The second mode was independent of gas pressure variation. The third mode measurement range nearly covered 1–500 Pa, and the linear fitting showed an excellent output linearity (R² = 0.995) and resolution (more than 0.5 Pa). The measurement range of the fourth mode covered 1–4000 Pa, and the fitting results showed high linearity (R² = 0.997) and about 1 Pa of resolution.

介绍了一种基于静电非线性的低真空测量微机电系统(MEMS)谐振真空计(RVG)。驱动传感单元的不同自然共振模式进行真空测量。在不同压力下驱动三种模式来测量共振频率与气体压力之间的关系，包括二阶共振模式（简称第二模式）、第三模式和第四模式。第二种模式与气压变化无关。第三模式测量范围几乎覆盖了 1-500 Pa，线性拟合显示出极好的输出线性（R ²  = 0.995）和分辨率（大于 0.5 Pa）。第四种模式的测量范围覆盖1-4000 Pa，拟合结果呈现高线性（R²  = 0.997) 和大约 1 Pa 的分辨率。