High Q factor multiple Fano resonance excitation in all-dielectric metasurfaces has become an effective mode to design high performance optical devices. This paper proposed an all-dielectric metasurface, composed of silicon cuboid etched with two semicircular holes into a unit cell and periodically arranged on a silica substrate. Numerical results show that triple high Q factor Fano resonances, corresponding to 1310 nm, 1401 nm and 1550 nm, are excited simultaneously, in its transmission spectrum. Toroidal dipole (TD) response can be identified for the resonance at 1310 nm, showing the Q value as high as 2617. By introducing a symmetry breaking, the quasi- bound states in the continuum (BIC) resonances at 1401 nm and 1550 nm are excited, which can be classified by electric quadrupole (EQ) and magnetic dipole (MD) response, respectively. Simulation results demonstrate that by adjusting the structure parameters, the designed metasurface can be tunable to meet the requirements of different applications in near infrared region. The sensing performances of the proposed structure are investigated as well, yielding the refractive index sensitivity of ~ 300 nm/RIU and maximum figure of merit (FOM) of ~ 440. Typical characteristics of the novel structure allow it to cater for the designs and applications of lasers, multiple channel nano sensors and other photonics modules in photonic integrated circuits (PIC) or optical communication devices.

全介电超表面中的高 Q 因子多重 Fano 共振激发已成为设计高性能光学器件的有效模式。本文提出了一种全介电超表面，由硅长方体和两个半圆形孔蚀刻成一个晶胞，并周期性地排列在二氧化硅衬底上。数值结果表明，对应于 1310 nm、1401 nm 和 1550 nm 的三重高 Q 因子 Fano 共振在其透射光谱中被同时激发。可以识别 1310 nm 共振的环形偶极 (TD) 响应，显示 Q 值高达 2617。通过引入对称破坏，1401 nm 和 1550 nm 连续谱 (BIC) 共振中的准束缚态为激发，可分别按电四极 (EQ) 和磁偶极 (MD) 响应分类。仿真结果表明，通过调整结构参数，设计的超表面可以进行可调，以满足近红外区域不同应用的要求。还研究了所提出结构的传感性能，产生了 ~ 300 nm/RIU 的折射率灵敏度和 ~ 440 的最大品质因数 (FOM)。新型结构的典型特征使其能够满足设计和应用需求光子集成电路 (PIC) 或光通信设备中的激光器、多通道纳米传感器和其他光子学模块。