Purpose

In the micro-resonant sensor, many physical fields, including mechanical force, electric field force, air damping force, and molecular force, exist simultaneously and interact with each other, which leads to the complex dynamic characteristics of the sensor, which will seriously affect its measurement sensitivity, cause large signal detection errors, or lead to high-end equipment detection misjudgment and ultimately major accidents and should be investigated.

Methods

Multi-field-coupled nonlinear dynamic equations of a micro-resonant pressure sensor are established, with the effects of the mechanical field, molecular field, and air damping field considered. The chaotic dynamical performance and chaotic control of the sensor are evaluated. A micro-resonant pressure sensor is fabricated, and a low-frequency closed-loop system is developed. The vibration performance of the sensor under different excitation voltages is evaluated.

Results

Results indicate that the initial clearance, resonator size, air damping coefficient, and excitation voltage considerably affect the chaotic vibration characteristics of the resonant sensor. By selecting the appropriate control signal values, the chaotic state of the sensor can be effectively controlled using the direct variable feedback method.

Conclusion

With the continued development of sensor miniaturization, the influences of the neglected molecular force, air damping force, and other forces on the performance of the sensor will become obvious and imperative to consider. These results can be used to determine the measurements of the resonators to prevent chaotic vibrations and ensure sensor performance.

中文翻译：

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多耦合场下MEMS谐振器的混沌动力学

目的

在微谐振传感器中，机械力、电场力、空气阻尼力、分子力等多种物理场同时存在并相互作用，导致传感器的动态特性复杂，严重影响其测量灵敏度，造成大信号检测误差，或导致高端设备检测误判，最终造成重大事故，应予以追究。

方法

考虑了机械场、分子场和空气阻尼场的影响，建立了微谐振压力传感器的多场耦合非线性动力学方程。评估了传感器的混沌动力学性能和混沌控制。制作了微谐振压力传感器，开发了低频闭环系统。评估了传感器在不同激励电压下的振动性能。

结果

结果表明，初始间隙、谐振器尺寸、空气阻尼系数和激励电压显着影响谐振传感器的混沌振动特性。通过选择合适的控制信号值，可以使用直接变量反馈方法有效地控制传感器的混沌状态。

结论

随着传感器小型化的不断发展，被忽视的分子力、空气阻尼力等力对传感器性能的影响将变得明显且必须考虑。这些结果可用于确定谐振器的测量值，以防止混沌振动并确保传感器性能。