In this paper the results of a first attempt to ignite an inverted fireball with a magnetron sputter source are presented. The conducted measurements show that there is no inverted fireball visible to the naked eye present during the experiments. However, some features are observed that indicate at least an initial onset of such an inverted fireball with an interruption before it is fully developed. In the course of the experiments magnetron sputtered molybdenum films have been deposited inside a highly transparent gridded anode and the obtained films have been analysed. It turns out that even without a visible inverted fireball being present, the film morphology and mechanical properties such as elastic modulus, hardness and surface roughness have changed significantly compared to a setup without inverted fireball anode. Additionally, the deposition rate is elevated by up to 20% inside the inverted fireball anode compared to the reference setup, although with a nearly threefold increase in total input power (cathode power + grid anode power). This increase in deposition rate was achieved despite the fact that a mesh electrode with only about 37% transparency was used. On the other hand, it was demonstrated that the use of additional gridded electrodes in such a device triggers instabilities and non-linearities in the plasma, which might be of interest for further fundamental research.

在本文中，介绍了首次尝试使用磁控溅射源点燃倒置火球的结果。进行的测量表明，在实验过程中不存在肉眼可见的倒转火球。然而，观察到的一些特征表明，这种倒转的火球在完全发展之前至少有一个中断的初始开始。在实验过程中，磁控溅射钼薄膜已沉积在高度透明的网格阳极内，并对所得薄膜进行了分析。结果表明，即使不存在可见的倒火球，与没有倒火球阳极的设置相比，薄膜形态和机械性能（如弹性模量、硬度和表面粗糙度）也发生了显着变化。此外，与参考设置相比，倒置火球阳极内部的沉积速率提高了 20%，尽管总输入功率（阴极功率 + 栅极阳极功率）增加了近三倍。尽管使用了仅具有约 37% 透明度的网状电极这一事实，但仍实现了沉积速率的提高。另一方面，已经证明在这种设备中使用额外的网格电极会触发等离子体中的不稳定性和非线性，这可能对进一步的基础研究感兴趣。尽管使用了仅具有约 37% 透明度的网状电极这一事实，但仍实现了沉积速率的提高。另一方面，已经证明在这种设备中使用额外的网格电极会触发等离子体中的不稳定性和非线性，这可能对进一步的基础研究感兴趣。尽管使用了仅具有约 37% 透明度的网状电极这一事实，但仍实现了沉积速率的提高。另一方面，已经证明在这种设备中使用额外的网格电极会触发等离子体中的不稳定性和非线性，这可能对进一步的基础研究感兴趣。