This letter proposes a force sensor that combines semiconductor strain gauges and metallic foil strain gauges to present force information of a higher dynamic range to robots. The strain gauges have different sensitivities, with semiconductor strain gauge sensitivity being approximately 90-fold than that of the metallic foil strain gauges. Using this difference in sensitivity, large forces and small forces are both detected through the two types of strain gauges and high dynamic range force detection is achieved by combining the output signals of these two. It was confirmed from the SN ratio test that the proposed sensor has a measurement range from 0.005 N to 1000 N, the maximum load. The dynamic range is 2 $\times 10^5$ , extending the dynamic range of the 6-axis force sensor with the highest range in previous studies two-fold.

中文翻译：

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采用半导体金属箔应变计组合的高动态范围 6 轴力传感器


这封信提出了一种力传感器，将半导体应变片和金属箔应变片相结合，向机器人呈现更高动态范围的力信息。应变片具有不同的灵敏度，半导体应变片的灵敏度大约是金属箔应变片的90倍。利用这种灵敏度差异，通过两种类型的应变片都可以检测大力和小力，并且通过组合这两种应变仪的输出信号来实现高动态范围力检测。通过信噪比测试证实，所提出的传感器的测量范围为 0.005 N 至 1000 N（最大负载）。动态范围为2$\times 10^5$，将之前研究中范围最高的6轴力传感器的动态范围扩展了两倍。