In this paper we introduce the concept, modelling and analysis of triangular and sinusoidal springs intended for large in-plane translational displacements for MEMS-guiding applications. The proposed spring systems combine the advantages of minimal space requirement, low stiffness in the axial direction and high mechanical resistance in off-axis directions. An analytical model for the description of the force-displacement characteristic of triangular springs is derived considering typical mechanical constraints. Based on the model, geometrical parameters of the springs influencing linearity and selectivity with respect to the in- and off-axis stiffness are analyzed. The validity of the models is demonstrated by finite element analysis and experimental verification realized by silicon-on-insulator demonstrators. [2020-0360]

中文翻译：

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用于表面 MEMS 中大位移的高选择性导向弹簧


在本文中，我们介绍了用于 MEMS 引导应用的大面内平移位移的三角形和正弦弹簧的概念、建模和分析。所提出的弹簧系统结合了最小空间需求、轴向方向上的低刚度和离轴方向上的高机械阻力的优点。考虑典型的机械约束，导出了描述三角形弹簧力-位移特性的分析模型。基于该模型，分析了影响轴内和离轴刚度线性度和选择性的弹簧几何参数。有限元分析和绝缘体上硅演示器实现的实验验证证明了模型的有效性。 [2020-0360]