Optical systems typically use galvanometers (galvos) and scanners. Galvos move, quasi-statically, from one static position to another. Scanners move in an oscillatory fashion, typically at the device resonant frequency. MEMS devices, which have many advantages and are often used in optical systems, are typically high Q devices. Moving from one position to another for a galvo or one amplitude to another for scanners, can take many periods to settle following the ring down. During these transitions, the optical system is inactive. Here, we show how precisely timed pulses can be used (in an open loop manner) to begin or end scanner motion without ring up/ring down time. The size of pulse required is found to depend on the Q of the device, and relationships are derived. The pulse can also be separated into multiple pulse spaced one period apart if pulses of the necessary size are not possible due to constraints of the physical device. For finite Q scanners, the amplitude decreases after the initial pulse due to damping. This can be eliminated by applying an excitation at the frequency of the scanner. The necessary amplitude for this excitation is derived. Finally, by combining this open loop control algorithm with an open loop control algorithm for galvo motion the device can seamlessly move between scanner and galvo functioning. These control algorithms are demonstrated using computer simulations, analytical models and a commercially available MEMS mirror (Mirrorcle Technologies, A8L2.2). [2020-0238]

中文翻译：

---

MEMS 振镜和扫描仪的前馈控制算法

光学系统通常使用检流计（galvos）和扫描仪。振镜准静态地从一个静态位置移动到另一个静态位置。扫描仪以振荡方式移动，通常以设备谐振频率移动。MEMS 器件具有许多优点，常用于光学系统中，通常具有高Q 设备。对于振镜从一个位置移动到另一个位置，或者对于扫描仪从一个幅度移动到另一个位置，在振铃下降后可能需要很多时间来稳定下来。在这些过渡期间，光学系统处于非活动状态。在这里，我们展示了如何使用精确定时脉冲（以开环方式）来开始或结束扫描仪运动，而无需振铃/振铃时间。发现所需的脉冲大小取决于设备的 Q 值，并导出关系。如果由于物理设备的限制而无法达到所需大小的脉冲，也可以将脉冲分成间隔一个周期的多个脉冲。对于有限Q 扫描仪，由于阻尼，振幅在初始脉冲后减小。这可以通过以扫描仪的频率施加激励来消除。推导出该激励所需的振幅。最后，通过将此开环控制算法与振镜运动的开环控制算法相结合，该设备可以在扫描仪和振镜功能之间无缝移动。这些控制算法使用计算机模拟、分析模型和商用 MEMS 反射镜 (Mirrorcle Technologies, A8L2.2) 进行演示。[2020-0238]