We demonstrate the design, fabrication and use of a dual electrode PMUT (Piezoelectric Micromachined Ultrasound Transducer) integrated with a microfluidic channel as a fluid density sensor in both static and dynamic density-change conditions. The dual electrode configuration makes the PMUT resonator a self-contained resonant peak-shift sensor and the microfluidic integration makes this system a versatile fluid density sensing platform that can be used with extremely low volumes of fluids in various industrial and healthcare applications. The density measurements carried out here under flowing fluid conditions demonstrate the potential of this system as a real-time fluid density monitoring system. We include results of density measurements in the range of 1020 - 1090 kg/m ³ that corresponds to the human blood density variation generally due to the change in its hemoglobin content. The sensitivity of the sensor—26.3 Hz/(kg/m ³ )—is good enough to reliably detect even 1% change in the hemoglobin content of the human blood. Thus, this system could potentially be used also as a hemoglobin measurement sensor in healthcare applications. [2021-0118]

中文翻译：

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用于流体密度传感的 PMUT 集成微流体系统


我们展示了与微流体通道集成的双电极 PMUT（压电微机械超声波换能器）的设计、制造和使用，作为静态和动态密度变化条件下的流体密度传感器。双电极配置使 PMUT 谐振器成为独立的谐振峰移传感器，微流体集成使该系统成为多功能流体密度传感平台，可在各种工业和医疗保健应用中使用极少量的流体。在流动流体条件下进行的密度测量证明了该系统作为实时流体密度监测系统的潜力。我们纳入了 1020 - 1090 kg/m ³范围内的密度测量结果，该结果对应于通常由于血红蛋白含量变化而导致的人体血液密度变化。该传感器的灵敏度为 26.3 Hz/(kg/m ³ )，足以可靠地检测人体血液中血红蛋白含量的 1% 变化。因此，该系统也有可能用作医疗保健应用中的血红蛋白测量传感器。 [2021-0118]