Miniaturized spectrometers are being developed in the recent few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site and mobile spectroscopic analysis. Although some devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost still don't meet the requirements for the ubiquitous deployment of the spectrometer as a spectral sensor needed for the smart industry and IoT applications. In this work we report an integrated microelectromechanical system (MEMS)-based Fourier Transform Infrared (FT-IR) spectral sensor. A monolithic scanning Michelson interferometer MEMS chip and an extended InGaAs photodetector chip are integrated with a micro-optical system in a tiny package with a footprint of 18 mm, presenting the smallest reported FT-IR solution to date. A compact light source head is designed and implemented targeting diffuse-reflection applications. The reported sensor's spectral resolution is about 66.6 cm-1 across the spectral range of 1350-2550 nm. The signal-to-noise ratio (SNR) achieved is 8000:1 at 2400 nm in 2 seconds, with an order of magnitude improvement with respect to previously reported fiber-coupled solution. The presented solution provides a low cost, low power, wide wavelength range NIR spectral sensor that can be manufactured with high volumes leveraging economies of scale.

中文翻译：

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适用于智能工业和物联网的超紧凑型傅里叶变换近红外 MEMS 光谱传感器


近年来，利用快速发展的技术，小型化光谱仪得到了发展，并引发了现场和移动光谱分析领域的新市场。尽管一些设备已针对近红外光谱（NIRS）实现商业化，但其尺寸和成本仍然无法满足光谱仪作为智能工业和物联网应用所需的光谱传感器的普遍部署的要求。在这项工作中，我们报告了一种基于集成微机电系统（MEMS）的傅里叶变换红外（FT-IR）光谱传感器。单片扫描迈克尔逊干涉仪 MEMS 芯片和扩展的 InGaAs 光电探测器芯片与微光学系统集成在一个占地 18 毫米的微型封装中，这是迄今为止报道的最小的 FT-IR 解决方案。紧凑型光源头是针对漫反射应用而设计和实现的。报道的传感器在 1350-2550 nm 光谱范围内的光谱分辨率约为 66.6 cm-1。 2 秒内在 2400 nm 处实现的信噪比 (SNR) 为 8000:1，相对于之前报道的光纤耦合解决方案提高了一个数量级。所提出的解决方案提供了一种低成本、低功耗、宽波长范围的近红外光谱传感器，可以利用规模经济进行大批量制造。