Use of cleaved wedge geometry for plan-view transmission electron microscopy sample preparation,Microscopy Research and Technique

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Use of cleaved wedge geometry for plan-view transmission electron microscopy sample preparation
Microscopy Research and Technique ( IF 2.0 ) Pub Date : 2021-07-15 , DOI: 10.1002/jemt.23876
Justinas Palisaitis ₁

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A fast, convenient, and easy to perform method for preparing plan-view transmission electron microscopy (TEM) specimens of brittle materials is proposed. The method is ideal for thin films/coatings and based on obtaining wedge-shape geometries of the samples via conventional cutting and cleaving followed by gentle focused ion beam (FIB) milling to electron transparency. It enables multiple parallel windows for depth sectioning of the samples and facilitates FIB lift-out procedure. The method has been successfully applied for preparing high-quality plan-view TEM samples for a range of films deposited on Si, SiC, and Al₂O₃ which significantly enhances throughput and reduces time at the FIB. The method further offers high success rate even for the novice, stable handling and reproducibility, which greatly widens the application of advanced plan-view TEM studies in material science.

中文翻译：

使用劈裂的楔形几何形状进行平面透视透射电子显微镜样品制备

提出了一种快速、方便且易于执行的方法，用于制备脆性材料的平面透射电子显微镜 (TEM) 样品。该方法是薄膜/涂层的理想选择，它基于通过常规切割和劈裂获得样品的楔形几何形状，然后通过温和的聚焦离子束 (FIB) 铣削至电子透明。它为样品的深度切片启用多个平行窗口，并促进 FIB 提取程序。该方法已成功应用于为沉积在 Si、SiC 和 Al ₂ O ₃上的一系列薄膜制备高质量的平面图 TEM 样品这显着提高了吞吐量并减少了 FIB 的时间。该方法进一步为新手提供了高成功率、稳定的处理和可重复性，极大地拓宽了先进的平面图 TEM 研究在材料科学中的应用。

更新日期：2021-07-15

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