We developed a piezoelectric micromachined cantilever acoustic vector (PEMCAV) sensor. We modeled the device using a “lumped” approach that considers fluid–structure interaction, the piezoelectric effect, and the mechanical impedance of the cantilever. Due to the high flexibility, the influence of the medium is significant, so fluid–structure interaction must be considered in theoretical modeling. We compared the model data to experimental results. The design parameters optimized using the derived analytical open-circuit sensitivity equation are presented, and the physical characteristics of the sensor are discussed. We used a micromachining technique to fabricate the sensor, added a preamplifier, and tested it using a reference hydrophone under a frequency range of 100 Hz–1 kHz. The analytical predictions and experimental results were in good agreement with respect to frequency response and the directivity of the sensor. Even when the sensor was much smaller than the wavelength ($ka\ll 1$), the proposed sensor exhibited a typical cosine directivity pattern, and the measured sensitivity at 100 Hz was −194 dBV/μPa.

中文翻译：

---

考虑流固耦合的压电微悬臂梁声矢量传感器设计

我们开发了压电微机械悬臂声矢量 (PEMCAV) 传感器。我们使用“集总”方法对设备进行建模，该方法考虑了流固耦合、压电效应和悬臂的机械阻抗。由于高柔性，介质的影响很大，因此在理论建模中必须考虑流固耦合。我们将模型数据与实验结果进行了比较。介绍了使用导出的分析开路灵敏度方程优化的设计参数，并讨论了传感器的物理特性。我们使用微加工技术制造传感器，添加前置放大器，并使用参考水听器在 100 Hz–1 kHz 的频率范围内对其进行测试。分析预测和实验结果在频率响应和传感器的方向性方面非常一致。即使传感器远小于波长（$克\mathrm{一种}\ll 1$)，所提出的传感器表现出典型的余弦方向性模式，在 100 Hz 下的测量灵敏度为 -194 dBV/μPa。