In the last decades, research and development of microfluidics have made extraordinary progress, since they have revolutionized the biological and chemical fields as a backbone of lab-on-a-chip systems. Further advancement pushes to miniaturize the architectures to nanoscale in terms of both the sizes and the fluid dynamics for some specific applications including investigation of biological sub-cellular aspects and chemical analysis with much improved detection limits. In particular, nano-scale channels offer new opportunities for tests at single cell or even molecular levels. Thus, nanofluidics, which is a microfluidic system involving channels with nanometer dimensions typically smaller than several hundred nm, has been proposed as an ideal platform for investigating fundamental molecular events at the cell-extracellular milieu interface, biological sensing, and more recently for studying cancer cell migration in a space much narrower than the cell size. In addition, nanofluidics can be used for sample manipulation in analytical chemistry, such as sample injections, separation, purifications or for quantitative and qualitative determinations. Among the nanofabrication technologies, ultrafast laser manufacturing is a promising tool for fabrication of nanofluidics due to its flexibility, versatility, high fabrication resolution and three dimensional (3D) fabrication capability. In this paper, we review the technological advancements of nanofluidic systems, with emphasis on fabrication methods, in particular ultrafast laser manufacturing. We present the challenges for issues concerning channel sizes and fluid dynamics, and introduce the applications in physics, biology, chemistry and engineering with future prospects.

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纳米流体系统的超快激光制造

在过去的几十年里，微流体的研究和开发取得了非凡的进展，因为它们已经彻底改变了生物和化学领域，作为芯片实验室系统的支柱。进一步的进步推动将结构在尺寸和流体动力学方面小型化到纳米级，以用于某些特定应用，包括生物亚细胞方面的研究和化学分析，检测限大大提高。特别是，纳米级通道为单细胞甚至分子水平的测试提供了新的机会。因此，纳米流体是一种微流体系统，涉及纳米尺寸通常小于数百纳米的通道，已被提议作为研究细胞 - 细胞外环境界面基本分子事件的理想平台，生物传感，最近用于研究癌细胞在比细胞大小更窄的空间中迁移。此外，纳米流体可用于分析化学中的样品处理，例如样品注射、分离、纯化或用于定量和定性测定。在纳米制造技术中，超快激光制造因其灵活性、多功能性、高制造分辨率和三维 (3D) 制造能力而成为制造纳米流体的有前途的工具。在本文中，我们回顾了纳米流体系统的技术进步，重点是制造方法，特别是超快激光制造。我们提出了有关通道尺寸和流体动力学问题的挑战，并介绍了在物理学、生物学、