We present a low-loss, compact, polarization insensitive 3-dB optical power-splitter for submicron silicon waveguides. The splitter is optimized over a broad wavelength span ranging from 1300 to 1700 nm through finite difference time domain simulations. The splitter junction footprint is only 1.8 × 1.3 µm, which is smaller than previously reported broadband multimode junction splitters. Furthermore, the demonstrated device overcomes the fabrication limitations of previous splitters while maintaining a compact size without any sharp angles. The device was fabricated using electron beam lithography. The experimental results show a small insertion loss of less than 0.3 dB for both the TE and TM polarizations.

中文翻译：

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一种紧凑型低损耗宽带偏振独立硅 50/50 分路器

我们提出了一种用于亚微米硅波导的低损耗、紧凑、偏振不敏感的 3-dB 光功率分配器。通过有限差分时域模拟，分光器在 1300 到 1700 nm 的宽波长范围内进行了优化。分路器结占位面积仅为 1.8 × 1.3 µm，比之前报道的宽带多模结分路器小。此外，所演示的设备克服了以前分路器的制造限制，同时保持紧凑的尺寸，没有任何锐角。该器件是使用电子束光刻技术制造的。实验结果表明，TE 和 TM 极化的插入损耗均小于 0.3 dB。