Sodium reduced tantalum powder and hydrogenation-dehydrogenation tantalum powder were spheroidized by RF plasma, respectively. Influences of carrier gas flow rate, powder feeding rate and secondary spheroidization on particle size and morphology of the spheroidized tantalum powders were investigated. Results show that hydrogenation-dehydrogenation tantalum powder is more appropriate for radio frequency plasma spheroidization than sodium reduced tantalum powder. Spheroidization ratio, powder collection ratio and average particle size of the spheroidized tantalum powder all decrease as the carrier gas flow rate increases. Powder collection ratio and particle size decrease with the decrease of the powder feeding rate. Moreover, spheroidization ratio, flowability and apparent density of the spheroidized tantalum powder increases after secondary spheroidization process while particle size of it decreases.

钠还原钽粉和加氢脱氢钽粉分别通过射频等离子体球化。研究了载气流量、送粉速度和二次球化对球化钽粉粒径和形貌的影响。结果表明，加氢-脱氢钽粉比钠还原钽粉更适合射频等离子体球化。球化钽粉的球化率、集粉率和平均粒径均随着载气流量的增加而降低。粉末收集率和粒度随着送粉率的降低而降低。此外，球化率，