Precession electron diffraction (PED) was used to measure the long-range order parameter in lattice-mismatched AlInP epitaxial films under investigation for solid-state-lighting applications. Both double- and single-variant films grown at 620, 650 and 680 °C were analysed in TEM cross-section. PED patterns were acquired in selected-area-diffraction mode through external microscope control using serial acquisition, which allows inline image processing. The integrated peak intensities from experimental patterns were fit using dynamical simulations of diffraction from the ordered domain structures. Included in the structure-factor calculations were mean atomic displacements of the anions (P) due to ordering, which were found by valence-force-field calculations to have a nearly linear dependence on order parameter. A maximum order parameter of S = 0.36 was measured for a double-variant specimen grown at 650 °C.

中文翻译：

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使用进动电子衍射对晶格失配的 AlInP 进行定量有序参数测量

旋进电子衍射 (PED) 用于测量晶格失配的 AlInP 外延膜中的长程有序参数，用于固态照明应用。在 TEM 横截面中分析了在 620、650 和 680 °C 下生长的双变体和单变体薄膜。PED 图案是通过使用串行采集的外部显微镜控制在选定区域衍射模式下获得的，这允许在线图像处理。使用来自有序域结构的衍射的动力学模拟拟合来自实验图案的积分峰强度。结构因子计算中包括由有序引起的阴离子 (P) 的平均原子位移，通过价力场计算发现其对有序参数具有近乎线性的依赖性。最大阶参数为对于在 650 °C 下生长的双变体样品，测量了S = 0.36。