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One-shot deflectometry for high-speed inline inspection of specular quasi-plane surfaces
Optics and Lasers in Engineering ( IF 3.5 ) Pub Date : 2021-07-03 , DOI: 10.1016/j.optlaseng.2021.106728
Manh The Nguyen 1, 2 , Young-Sik Ghim 1, 2 , Hyug-Gyo Rhee 1, 2
Affiliation  

Deflectometry is a non-contact optical technique which uses a simple system setup to measure and inspect specular surfaces. Conventional deflectometry methods usually need very complicated system calibration and time-consuming phase-shifting methods, which are not practical for high-speed measurement. But if the measurement target is a quasi-plane surface where the local slope is directly modulated by phase, the complicated system calibration can be neglected. In this study, to reduce error, we investigated and analyzed error contribution when measuring quasi-plane surfaces. A simple and high speed one-shot phase retrieval method is proposed for quickly measuring surface phase. We used a single high carrier-frequency composite pattern for pattern projection, and derivation of the captured fringe pattern for phase retrieval. A phase-related slope is obtained for slope calculation and the 3D shape is reconstructed by integrating the surface slopes. We verified our proposed method by measuring representative quasi-plane surfaces and comparing results with conventional methods.



中文翻译:

用于镜面准平面高速在线检测的一次性偏转测量法

偏转测量法是一种非接触式光学技术,它使用简单的系统设置来测量和检查镜面。传统的偏转测量方法通常需要非常复杂的系统校准和耗时的相移方法,这对于高速测量来说并不实用。但如果测量目标是局部斜率直接由相位调制的准平面,则复杂的系统校准可以忽略不计。在这项研究中,为了减少误差,我们调查和分析了测量准平面时的误差贡献。为快速测量表面相位,提出了一种简单、高速的单次相位检索方法。我们使用单个高载波频率复合图案进行图案投影,并导出捕获的条纹图案以进行相位检索。获得用于斜率计算的与相位相关的斜率,并通过积分表面斜率重建 3D 形状。我们通过测量代表性准平面表面并将结果与​​传统方法进行比较来验证我们提出的方法。

更新日期:2021-07-04
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