In this paper, we report an ultra-compact reflective SPR microtip temperature probe, which can achieve 2-D spatial resolution of several microns. The pencil-shaped all-fiber microtip proposed by us is a SO₂ cone-cylinder with a length of 40 μm and a gradient diameter of 2 μm-10 μm, which can be used to develop multi-type tiny functionalized sensors. Due to the strong evanescent field of the ultra-fine microtip, the surface plasmon resonance (SPR) can be effectively stimulated by depositing nano-silver (Ag) film on its surface. Owing to the high refractive index (RI) sensitivity of SPR effect and the high thermo-optic coefficient (TOC) of polydimethylsiloxane (PDMS), the temperature sensitivity of microtip SPR probe coated with PDMS micron-film can reach to 1.985 nm/°C. Teflon 1600 nano-film on the surface of the SPR thermometer can effectively enhance the non-stickiness, moisture-proof and wear resistance. The test results show that the probe is hardly disturbed by humidity. This new sensing platform can be demonstrated by assembling high-performance sensing materials and ultra-compact fiber-optic structures.

在本文中，我们报告了一种超紧凑型反射式 SPR 微尖端温度探头，它可以实现几微米的二维空间分辨率。我们提出的铅笔形全纤维微针是SO ₂长度为40 μm，梯度直径为2 μm-10 μm的锥形圆柱体，可用于开发多类型微型功能化传感器。由于超细微尖端的强大渐逝场，可以通过在其表面沉积纳米银 (Ag) 膜来有效激发表面等离子体共振 (SPR)。由于SPR效应的高折射率（RI）灵敏度和聚二甲基硅氧烷（PDMS）的高热光系数（TOC），涂有PDMS微米薄膜的微尖SPR探针的温度灵敏度可达1.985 nm/°C . SPR温度计表面的Teflon 1600纳米薄膜可有效增强不粘性、防潮和耐磨性。测试结果表明，探头几乎不受湿度干扰。