Waveguide photodetectors (WGPDs) are one of the promising candidates to solve the tradeoff between the quantum efficiency and the transit time in the surface illuminated photodiodes where the lightwave is incident laterally perpendicular to the direction of the flow of generated carriers, enhancing both high speed and quantum efficiency. In Mushroom-WGPDs, the performance degradation due its parasitic capacitance and the load resistance is overcome due to the mesa mushroom structure. Inaccuracies in the dimensions of’Mushroom-WGPDs due to the fabrication affect its functionality and its operating bandwidth. In this work, a stochastic analysis of the Mushroom-WGPD that is based on Drift Diffusion model and Monte Carlo simulations is presented. The tolerances of the dimensions of the Mushroom-WGPD and their impacts on the photodetector performance and bandwidth-biasing are studied for different biasing. Both the standard deviations and the probability distribution function of bandwidth are studied.

波导光电探测器 (WGPD) 是解决表面照明光电二极管中量子效率和渡越时间之间权衡的有希望的候选者之一，其中光波垂直于产生的载流子流动方向横向入射，提高了高速和量子效率。在 Mushroom-WGPD 中，由于其寄生电容和负载电阻导致的性能下降由于台面蘑菇结构而被克服。由于制造而导致的“蘑菇-WGPD”尺寸不准确会影响其功能和工作带宽。在这项工作中，提出了基于漂移扩散模型和蒙特卡罗模拟的 Mushroom-WGPD 随机分析。针对不同的偏置研究了 Mushroom-WGPD 尺寸的公差及其对光电探测器性能和带宽偏置的影响。研究了带宽的标准偏差和概率分布函数。