In order to study the influence mechanism of the motion accuracy of the air static pressure guide system, this article combines the internal transmission law of the driving part of the table and the coupling analysis of solid damping and micro-scale gas damping and establishes the stepping motor, ball screw, nut, and motion table. The four-degree-of-freedom operation model was used to study the response simulation and dynamic characteristics of the entire table under the influence of various components. Combined with the damping characteristics extracted from the experiment, the influence mechanism of micro-gap solids and gas damping on the motion accuracy of the air-floating table is analyzed, and the optimal structural scheme that can effectively improve the accuracy and stability is proposed to improve the performance of the air-floating table and ultra-precision machine tools, processing accuracy to solve key technical problems in improving nano-machining accuracy.

为了研究空气静压导向系统运动精度的影响机理，本文结合工作台驱动部分的内部传递规律和固体阻尼与微尺度气体阻尼的耦合分析，建立了步进式电机、滚珠丝杠、螺母和运动台。采用四自由度运行模型，研究了整个工作台在各部件作用下的响应仿真和动态特性。结合实验提取的阻尼特性，分析了微间隙固体和气体阻尼对气浮台运动精度的影响机理，