Vapor phase infiltration (VPI) is a bottom-up process that involves the infiltration of polymers, often using atomic layer deposition compatible precursors. By exposing a polymer to an organo-metallic precursor, area selective material formation is achieved where the precursor reacts with regions covered by an infiltration-receptive polymer brush. Combining receptive and rejecting polymers that have the capability of forming complex nanopatterns could potentially allow for the creation of nanofeatures, offering a route to area selective deposition. This work is concerned with the creation and characterization of titanium-infiltrated films with a VPI process. Thin films of poly(methyl methacrylate) (PMMA) were infused with titanium isopropoxide and subsequently analyzed with angular resolved x-ray photoelectron spectroscopy. All XPS analysis and VPI treatments were completed without breaking vacuum in an integrated ultrahigh vacuum setup, with O 1s, C 1s, Ti 2p, and Si 2p core levels revealing the successful incorporation of titanium into the polymer. Grazing angle Fourier-transform infrared spectroscopy demonstrates the breaking of carbon–oxygen double bonds within the PMMA structure due to titanium incorporation.

中文翻译：

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钛渗入超薄 PMMA 刷子

气相渗透 (VPI) 是一种自下而上的过程，涉及聚合物的渗透，通常使用原子层沉积相容的前体。通过将聚合物暴露于有机金属前驱体，实现区域选择性材料形成，其中前驱体与被渗透接受聚合物刷覆盖的区域反应。结合具有形成复杂纳米图案能力的接受和拒绝聚合物可能允许创建纳米特征，为区域选择性沉积提供途径。这项工作涉及使用 VPI 工艺创建和表征钛渗透膜。聚甲基丙烯酸甲酯 (PMMA) 薄膜注入异丙醇钛，随后用角分辨 X 射线光电子能谱进行分析。s、C 1 s、Ti 2 p和Si 2 p核能级表明钛成功地结合到聚合物中。掠角傅里叶变换红外光谱表明，由于钛的掺入，PMMA 结构内的碳氧双键断裂。