In this article, we introduce novel transmission line standards for on-wafer thru-reflect-line (TRL) calibration employing a meandering architecture, which aims to keep the interprobe distance constant and avoid any probe separation during the measurement process, yet establishing the required signal path length between the ports. Measurements will be performed up to 500 GHz on passive de-embedding structures and on a silicon-germanium heterojunction bipolar transistor (SiGe HBT); they will be calibrated with both a classic approach and this novel “meander-type” technique. Furthermore, measurements will be evaluated by means of electromagnetic (EM) simulation: For this purpose, we will make use of Ansys High-Frequency Structure Simulator (HFSS) on passive test structures. Finally, a novel joint EM-SPICE cosimulation analysis will allow us to provide simulated data for a transistor, thus extending our study to active devices; this will allow a complete characterization of the measurements and an insight on the physical limits of our calibration technique.

中文翻译：

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曲折线：用于毫米波和亚毫米波频率测量的晶圆上 TRL 校准的创新设计

在本文中，我们介绍了采用曲折结构的晶圆上直通反射线 (TRL) 校准的新型传输线标准，旨在保持探头间距离恒定并避免测量过程中的任何探头分离，同时建立所需的端口之间的信号路径长度。将在无源去嵌入结构和硅锗异质结双极晶体管 (SiGe HBT) 上进行高达 500 GHz 的测量；它们将使用经典方法和这种新颖的“曲折式”技术进行校准。此外，测量将通过电磁 (EM) 仿真进行评估：为此，我们将在无源测试结构上使用 Ansys 高频结构仿真器 (HFSS)。最后，新的联合 EM-SPICE 协同仿真分析将使我们能够提供晶体管的仿真数据，从而将我们的研究扩展到有源器件；这将允许对测量进行完整的表征并深入了解我们校准技术的物理限制。