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Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types
IEEE Transactions on Automation Science and Engineering ( IF 5.9 ) Pub Date : 3-9-2021 , DOI: 10.1109/tase.2021.3061140
Sung-Gil Ko , Tae-Sun Yu , Tae-Eog Lee

This paper investigates the event-triggered secure control problem for fuzzy Markov jump systems (MJSs) with time-varying delays. In order for higher resource efficiency, a multi-level probabilistic event-triggered mechanism (MLPETM) is newly established, which reduces the data transmission frequency by investigating possible variations of triggering thresholds. Given the network-induced phenomena, the MLPETM’s output may undergo cyber-attacks, and the controller may not switch synchronously along with the system. Asynchronous secure controllers are thus developed to perform secure control of fuzzy MJSs. Sufficient conditions dependent on fuzzy basis functions, state delays and jumping modes are established to guarantee the dissipative finite-time boundedness of the resultant closed-loop system. Afterward, an easy-to-check fuzzy secure control algorithm is developed to compute the controller gains. Finally, the one-link robotic arm system and the truck-trailer system are borrowed to validate the proposed results. Note to Practitioners—Networked control systems (NCSs) play a key role in real applications like automobile industry, power systems, and autonomous mobile robots. As a key part, the communication network such as Controller Area Network is embedded into the NCSs to perform the communication tasks between different control units. In spite of great benefits from the communication network, both the security and the efficiency issues of the data transmission are challenging for the engineering designer. Besides, the target physical system is usually nonlinear, and is very likely to undergo abrupt changes in the networked environment. In terms of these challenges, this paper studies the asynchronous security control of networked Markov jump systems with time-varying delays and randomly occurring cyber-attacks. A multi-level probabilistic event-triggered mechanism (MLPETM) is newly established, which studies the effect of the stochastic variation regarding the t...

中文翻译:


具有多种晶圆类型的双臂集群工具的并行室的晶圆延迟分析和工作负载平衡



本文研究了具有时变延迟的模糊马尔可夫跳跃系统(MJS)的事件触发安全控制问题。为了获得更高的资源效率,新建立了多级概率事件触发机制(MLPETM),通过调查触发阈值可能的变化来降低数据传输频率。鉴于网络引起的现象,MLPETM的输出可能会受到网络攻击,并且控制器可能不会与系统同步切换。因此开发了异步安全控制器来执行模糊 MJS 的安全控制。建立了依赖于模糊基函数、状态延迟和跳跃模式的充分条件,以保证所得闭环系统的耗散有限时间有界性。随后,开发了一种易于检查的模糊安全控制算法来计算控制器增益。最后,借用单连杆机械臂系统和卡车拖车系统来验证所提出的结果。从业者须知——网络控制系统 (NCS) 在汽车工业、电力系统和自主移动机器人等实际应用中发挥着关键作用。作为关键部分,控制器局域网等通信网络被嵌入到NCS中,以执行不同控制单元之间的通信任务。尽管通信网络带来了巨大的好处,但数据传输的安全性和效率问题对工程设计者来说都是挑战。此外,目标物理系统通常是非线性的,在网络环境中很可能发生突变。 针对这些挑战,本文研究了具有时变延迟和随机发生网络攻击的网络化马尔可夫跳跃系统的异步安全控制。新建立了多级概率事件触发机制(MLPETM),研究随机变化对事件的影响...
更新日期:2024-08-22
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