The coordinate measuring machine (CMM) is one of the most widely used precision measurement machines in the machinery industry. In this study, the analysis and compensation of structural deformation in spatial coordinates effectively depicts the improvement of the spatial accuracy of the motion of a three-dimensional measuring machine in a measurement area. In addition to accuracy, it is also projected that the measurement can be carried out more efficiently. Therefore, the measurement speed of the CMM and dynamic characteristics of the structure are becoming increasingly important. Consequently, the measuring machine has better dynamic characteristics and meets high precision requirements. During measurement, the geometric errors generated by the machine are mainly because of its moving structure in the spatial position. In this study, the CMM is driven by aerostatic bearings; the boundary conditions and parameter settings of each component are established to obtain analysis results that are highly consistent with the actual machine characteristics. The finite element method is used as an analysis tool, including static deformation, modal, spectrum, and transient analyses. Because of the structural deformation and spatial geometric errors caused by the moving structure of the measuring machine, the relative deformation errors can be evaluated through the analysis of the spatial position error compensation to improve the measurement accuracy of the machine.

三坐标测量机（CMM）是机械工业中应用最广泛的精密测量机之一。本研究通过空间坐标中结构变形的分析和补偿，有效地描述了三维测量机在测量区域内运动的空间精度的提高。除了准确性之外，还预计可以更有效地进行测量。因此，三坐标测量机的测量速度和结构的动态特性变得越来越重要。因此，测量机具有更好的动态特性，满足高精度要求。在测量过程中，机器产生的几何误差主要是由于其在空间位置上的运动结构。在这项研究中，CMM由空气静力轴承驱动；建立各部件的边界条件和参数设置，以获得与实际机器特性高度一致的分析结果。有限元方法用作分析工具，包括静态变形、模态、谱和瞬态分析。由于测量机运动结构引起的结构变形和空间几何误差，可以通过空间位置误差补偿的分析来评估相对变形误差，以提高机器的测量精度。有限元方法用作分析工具，包括静态变形、模态、谱和瞬态分析。由于测量机运动结构引起的结构变形和空间几何误差，可以通过空间位置误差补偿的分析来评估相对变形误差，以提高机器的测量精度。有限元方法用作分析工具，包括静态变形、模态、谱和瞬态分析。由于测量机运动结构引起的结构变形和空间几何误差，可以通过空间位置误差补偿的分析来评估相对变形误差，以提高机器的测量精度。