With the increase in demand for various types of small-aperture aspherical optical parts, the machining of a small tungsten carbide alloy mould with high accuracy is not only required, but essential. Ultra-precision grinding is generally used to process the small tungsten alloy aspheric mould, but there are some grinding marks and surface defects left by grinding. Aimed at the problems above, this paper introduce a new compound processing technology which integrates ultra-precision grinding and oblique-axis magnetorheological polishing technology on the same machine tool. First, we developed the machining equipment of oblique-axis ultra-precision grinding and magnetorheological polishing, and then, we analyzed the surface accuracy, surface roughness, microstructure and subsurface damage of tungsten alloy aspheric mould after grinding and polishing. The experimental results indicated that the surface accuracy of workpiece was improved to smaller than 200 nm in PV value, surface roughness Ra was reduced to about 1 nm after using the compound processing technology.

随着对各类小孔径非球面光学零件需求的增加，高精度加工小型碳化钨合金模具不仅是必需的，而且是必不可少的。小型钨合金非球面模具一般采用超精密磨削加工，但磨削后会留下一些磨痕和表面缺陷。针对上述问题，本文介绍了一种将超精密磨削和斜轴磁流变抛光技术在同一台机床上集成的复合加工新技术。首先，我们开发了斜轴超精密磨削和磁流变抛光加工设备，然后对钨合金非球面模具磨削抛光后的表面精度、表面粗糙度、微观结构和亚表面损伤进行了分析。