In this study, the effect of observed pinholes in the Field emission scanning electron microscopy (FESEM) images on the performance of a silver-based surface plasmon resonance (SPR) biosensor is designed and analytically investigated by a finite element method using COMSOL multiphysics. The simulation results show that the sensitivity and figure of merit (FOM) enhancement of biosensor is attributed to the cold atmospheric-pressure plasma (CAP) treatment of glass substrate before deposition; leading to the omission of pinholes. This work is proposing a new way for SPR biosensors development using surface quality control of the deposited thin films with CAP treatment.

在本研究中，使用 COMSOL 多物理场通过有限元方法设计并分析了场发射扫描电子显微镜 (FESEM) 图像中观察到的针孔对银基表面等离子体共振 (SPR) 生物传感器性能的影响。模拟结果表明，生物传感器的灵敏度和品质因数 (FOM) 的增强归因于在沉积前对玻璃基板进行冷常压等离子体 (CAP) 处理；导致遗漏针孔。这项工作为 SPR 生物传感器的开发提出了一种新方法，即使用 CAP 处理对沉积薄膜的表面质量控制。