Abstract

Multilayers’ absorption DMDM structure of SiO₂/TiN_x/SiO₂/VO_x structure for 8-14 infrared wavelengths is proposed and simulated. Between mid-infrared 8 μm and 14 μm wavelengths, infrared detector with this structure and thermal sensitive VO_x of −7%/K TCR, which exhibits high infrared absorption about average 83%, has been fabricated and tested successfully.

中文翻译：

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用于非冷却红外辐射热计的具有 TiN 吸收层的氧化钒热敏薄膜

摘要

提出并模拟了SiO ₂ /TiN _x /SiO ₂ /VO _x结构对8-14个红外波长的多层吸收DMDM结构。在中红外 8 μm 和 14 μm 波长之间，具有这种结构和热敏 VO _x为 -7%/K TCR 的红外探测器已成功制造并测试，其具有平均约 83% 的高红外吸收率。