In this work, we designed, fabricated, and characterized a ZnS single-layer antireflection coating on Ge substrate, suitable for infrared range. To improve the coatings hardness, Ge_0.1C_0.9 film was deposited on the prepared coating. Y₂O₃ thin film was applied as adhesive layer between the ZnS film/Ge substrate and the Ge_1-xC_x film/ZnS film. The morphology and surface roughness of the samples were studied by FE-SEM and AFM analyses. The optical and mechanical properties of the resultant multilayer sample were investigated. The results showed that Ge_0.1C_0.9 coating does not change the refractive index of the antireflection coating. The indentation test showed that the hardness is improved from 5.9 to 7.8 GPa. After coating Ge_0.1C_0.9 layer, the sample successfully passed the environmental and durability tests.

在这项工作中，我们在 Ge 衬底上设计、制造并表征了适用于红外范围的 ZnS 单层抗反射涂层。为了提高涂层硬度，在制备的涂层上沉积了Ge _0.1 C _0.9薄膜。Y ₂ O ₃薄膜用作ZnS膜/Ge衬底和Ge _1-x C _x膜/ZnS膜之间的粘合层。通过FE-SEM和AFM分析研究样品的形态和表面粗糙度。研究了所得多层样品的光学和机械性能。结果表明，Ge _0.1 C _0.9涂层不会改变抗反射涂层的折射率。压痕测试表明硬度从5.9 GPa提高到7.8 GPa。涂覆Ge _0.1 C _0.9层后，样品成功通过环境和耐久性测试。