The influences of cusp magnetic field on the turbulent melt flow and the crystal/melt interface are studied by three-dimensional unsteady simulations for 300 mm industrial Czochralski silicon crystal growth. Detailed comparisons are implemented for the melt flow pattern, temperature and velocity oscillations as well as the crystal/melt interface with and without magnetic field. It is found that the melt flow is complex and irregular in this system, accompanied with rich flow structures and large temperature and velocity fluctuations. Under the application of cusp magnetic field, the turbulent melt flow is significantly inhibited with the simple flow structure as well as the periodic temperature and velocity fluctuations. The anticlockwise periodical flow in the melt induced by cusp magnetic field can help to reduce the impurity in the crystal and suppress the crystal/melt interface deformation. In particular, the thermal waves on the melt free surface are firstly observed with cusp magnetic field for large-size Czochralski silicon crystal growth, traveling in the direction of crucible rotation.

通过 300 毫米工业直拉硅晶体生长的三维非稳态模拟，研究了尖端磁场对湍流熔体流动和晶体/熔体界面的影响。对熔体流动模式、温度和速度振荡以及有和没有磁场的晶体/熔体界面进行了详细比较。发现该系统中熔体流动复杂且不规则，流动结构丰富，温度和速度波动大。在尖峰磁场的作用下，熔体的湍流流动受到明显抑制，流动结构简单，温度和速度周期性波动。尖峰磁场引起熔体中的逆时针周期性流动有助于减少晶体中的杂质并抑制晶体/熔体界面变形。特别是，首先观察熔体自由表面上的热波，用于大尺寸直拉硅晶体生长的尖端磁场，沿坩埚旋转方向传播。