Angular distributions of atoms sputtered from a copper target under 5-keV Kr⁺ bombardment at normal incidence were simultaneously and independently studied by experiments and computer simulation. The sputtered particles are collected on a Mylar™ foil placed around the target. Deposited particles on the substrate were analyzed by optical transmission spectroscopy. The surface roughness of the irradiated target was studied by atomic force microscopy, surface profilometry, and scanning electron microscopy. The experimental results were compared with the simulated angular distributions (programs OKSANA, SDTrimSP, and SRIM) and were found to be in reasonable agreement. In all cases, the angular distribution of sputtered particles showed an over-cosine shape, which may be associated with noncompensated scattering of ejected particles by surface atoms when exiting the target. The results obtained are compared with the data from the literature.

中文翻译：

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5-keV Kr 离子从铜靶溅射的粒子的角分布：实验和模拟研究

在 5-keV Kr ⁺下从铜靶溅射的原子的角分布通过实验和计算机模拟同时独立地研究了法向入射的轰击。溅射的粒子被收集在围绕目标放置的 Mylar™ 箔上。通过光学透射光谱分析基材上沉积的颗粒。通过原子力显微镜、表面轮廓测定法和扫描电子显微镜研究照射目标的表面粗糙度。将实验结果与模拟的角度分布（程序 OKSANA、SDTrimSP 和 SRIM）进行比较，发现它们具有合理的一致性。在所有情况下，溅射粒子的角度分布都显示出过余弦形状，这可能与离开靶时表面原子对喷射粒子的非补偿散射有关。