The laser chemical process is a material-removing machining process in the micro range. The process is based on a laser-assisted etching process between an electrolyte and a metallic workpiece. Local overheating causes a laser-induced electrolyte boiling process, which limits the laser chemical process window. In order to reduce the laser-induced electrolyte boiling process and thus expand the process window, the laser chemical process is carried out at different electrolyte start temperatures and thus different electrolyte viscosities and surface tensions. The experimental investigations were carried out on Titanium Grade 1 with the electrolytes phosphoric acid and sulfuric acid at different electrolyte temperatures and laser powers to determine the limits of the process window by evaluating the properties of the removal cavities. As a result, the process window is extended at lower electrolyte viscosities. Thereby, the electrolyte viscosities have no influence on the geometric shape of the removal. The extension of the process window is attributed to the fact that a reduction in electrolyte viscosity results in a less pronounced formation of the boiling process, the bubble diameters decrease, and the shielding effect of the bubbles is reduced.

激光化学工艺是一种微观范围内的材料去除加工工艺。该工艺基于电解质和金属工件之间的激光辅助蚀刻工艺。局部过热会导致激光诱导电解液沸腾过程，从而限制了激光化学过程窗口。为了减少激光诱导的电解液沸腾过程，从而扩大工艺窗口，激光化学过程在不同的电解液起始温度和不同的电解液粘度和表面张力下进行。在不同的电解液温度和激光功率下，使用电解液磷酸和硫酸对 1 级钛进行了实验研究，以通过评估去除腔的特性来确定工艺窗口的限制。因此，工艺窗口在较低的电解质粘度下扩展。因此，电解质粘度对去除的几何形状没有影响。工艺窗口的扩展归因于以下事实：电解质粘度的降低导致沸腾过程的形成不太明显，气泡直径减小，并且气泡的屏蔽效果降低。