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Cost-effective technique to fabricate a tubular through-hole anodic aluminum oxide membrane using one-step anodization
Microelectronic Engineering ( IF 2.3 ) Pub Date : 2021-06-26 , DOI: 10.1016/j.mee.2021.111589
Yu-Chin Chien , Huei Chu Weng

In order to reduce the time required to prepare a tubular through-hole anodic aluminum oxide (AAO) membrane, this study improved the manufacturing processes using one-step anodization. AAO membranes were first prepared by using 6063 commercial aluminum alloy tubes using an external anodizing method. The manufacturing processes for a tubular through-hole AAO membrane include: annealing, physically wet grinding, buff wheel polishing, ultrasonic cleaning, one-step anodizing, aluminum substrate removing, and barrier layer alumina (BLA) etching. The influence of chemical etching time on the nanostructure of AAO membranes was observed by a Field Emission Scanning Electron Microscope (FE-SEM). The results of the fabrication of a tubular through-hole AAO membrane showed that increasing the chemical etching time of the BLA etching process could result in an enhanced nanotube pore size and a reduced AAO membrane thickness, and excessive chemical etching time would collapse the nanotube structure. The tubular through-hole AAO membrane obtained was straight nanotubes with a thickness of 48 μm and an average bottom pore size of 109 nm.



中文翻译:

使用一步阳极氧化制造管状通孔阳极氧化铝膜的成本效益技术

为了减少制备管状通孔阳极氧化铝 (AAO) 膜所需的时间,本研究使用一步阳极氧化改进了制造工艺。AAO 膜首先通过使用外部阳极氧化方法使用 6063 商用铝合金管制备。管状通孔AAO膜的制造工艺包括:退火、物理湿磨、抛光轮抛光、超声波清洗、一步阳极氧化、铝基板去除和阻挡层氧化铝(BLA)蚀刻。通过场发射扫描电子显微镜(FE-SEM)观察化学蚀刻时间对AAO膜纳米结构的影响。管状通孔AAO膜的制备结果表明,增加BLA蚀刻工艺的化学蚀刻时间会导致纳米管孔径增大和AAO膜厚度减小,过多的化学蚀刻时间会使纳米管结构坍塌. 得到的管状通孔AAO膜为直管状纳米管,厚度为48 μm,平均底部孔径为109 nm。

更新日期:2021-07-01
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