Abstract—

The influence of the parameters of a scanning electron microscope (SEM) on its calibration using test objects with a trapezoidal profile and large inclination angles of the side walls is studied. The focusing of the SEM probe and the energy of its electrons affect SEM calibration in the modes of collecting secondary slow electrons and backscattered electrons. It is shown that the microscope can be calibrated only in the low-voltage mode of operation with an energy of primary electrons less than 2 keV and in the mode of collecting secondary slow electrons with an energy of primary electrons more than 10 keV. A model of the formation of microscope signals in these energy ranges is presented. The influence of contamination on the lifetime of the test object and on the calibration accuracy of the scanning electron microscope is considered.

中文翻译：

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扫描电子显微镜的校准：1. SEM 参数的选择

摘要——

研究了扫描电子显微镜 (SEM) 的参数对其使用梯形轮廓和侧壁大倾角的测试对象进行校准的影响。SEM探针的聚焦及其电子能量以收集二次慢电子和背向散射电子的方式影响SEM校准。结果表明，显微镜只能在初级电子能量小于2 keV的低电压工作模式和初级电子能量大于10 keV的二次慢电子收集模式下进行校准。提出了在这些能量范围内形成显微镜信号的模型。考虑了污染对测试对象寿命和扫描电子显微镜校准精度的影响。