Measurements of the roughness parameters and fractal dimension of the surface of Cu/Co superlattices are carried out by scanning tunneling microscopy. The fractal analysis of the superlattice surface shows that the fractal-dimension curve can be divided into two sections with different slopes depending on the scanning step. On the fractal-dimension curve, two intervals can be distinguished that define groups of objects that are heterogeneous in morphology: the fractal dimension of the nanostructure grains and the fractal dimension of the surface microrelief. In this regard, the parameters of the root-mean-square roughness of the surface relief and the fractal dimension of the surface morphology can be used as quantitative parameters for analyzing the structural features of the surface of superlattices at the final stage of their synthesis.

Cu/Co超晶格表面粗糙度参数和分形维数的测量是通过扫描隧道显微镜进行的。超晶格表面的分形分析表明，分形维数曲线可以根据扫描步长的不同，分为斜率不同的两段。在分形维数曲线上，可以区分两个区间，它们定义了形态异质的对象组：纳米结构颗粒的分形维数和表面微浮雕的分形维数。在这方面，表面起伏的均方根粗糙度和表面形貌的分形维数等参数可作为定量参数，用于分析超晶格合成最后阶段的表面结构特征。