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Enhanced infrared photoresponse of a new InGaZnO TFT based on Ge capping layer and high-k dielectric material
Micro and Nanostructures ( IF 2.7 ) Pub Date : 2021-06-24 , DOI: 10.1016/j.spmi.2021.106967
H. Ferhati , F. Djeffal , L.B. Drissi

In this paper, a novel InGaZnO (IGZO) Infrared (IR) thin-film Phototransistor (Photo-TFT) consisting of Germanium capping layer (Ge-CL) and high-k dielectric material is proposed and numerically investigated. The role of introducing Ge-CL/IGZO heterojunction and high-k dielectric such as HfO2, ZrO2, Ta2O5 and TiO2 in achieving the dual benefit of IR photodetection ability and reduced dark noise effects is demonstrated. It is found that the proposed Ge-CL/IGZO Photo-TFT with appropriate gate oxide material can offer high detectivity of 2.3 × 1014 Jones, superior current ratio exceeding 200 dB and high IR responsivity of 4.1 × 102 A/W. These enhancements are attributed to a mixture of two effects; firstly, the introduction of p-type Ge-CL leads to form a p-n junction with IGZO, thus enhancing the separation and transfer mechanisms of photo-induced electron/hole pairs. Secondly, the use of high-k dielectric materials enables better control of the channel conductivity, allowing reduced power consumption. Therefore, we believe that the use of Ge-CL with suitable high-k dielectric material pinpoints a new pathway to design high IR photoresponse sensors based on cost-effective IGZO TFT building block, which makes it potential alternative for high-performance optoelectronic systems.



中文翻译:

基于Ge覆盖层和高k介电材料的新型InGaZnO TFT增强的红外光响应

在本文中,提出并数值研究了一种由锗覆盖层 (Ge-CL) 和高 k 介电材料组成的新型 InGaZnO (IGZO) 红外 (IR) 薄膜光电晶体管 (Photo-TFT)。证明了引入 Ge-CL/IGZO 异质结和高 k 电介质(如 HfO 2、ZrO 2、Ta 2 O 5和 TiO 2 )在实现红外光电探测能力和降低暗噪声效应的双重好处中的作用。结果表明,所提出的具有适当栅极氧化物材料的 Ge-CL/IGZO Photo-TFT 可提供 2.3 × 10 14 Jones 的高探测率、超过 200 dB 的优异电流比和 4.1 × 10 2 的高红外响应率秋/冬。这些增强归因于两种效果的混合;首先,p型Ge-CL的引入导致与IGZO形成pn结,从而增强了光生电子/空穴对的分离和转移机制。其次,使用高 k 介电材料可以更好地控制沟道电导率,从而降低功耗。因此,我们相信使用 Ge-CL 和合适的高 k 介电材料为设计基于具有成本效益的 IGZO TFT 构建块的高红外光响应传感器指明了一条新途径,这使其成为高性能光电系统的潜在替代品。

更新日期:2021-06-28
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