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Parameter retrieval of small particles in dark-field Fourier ptychography and a rectangule in real-space ptychography
Ultramicroscopy ( IF 2.1 ) Pub Date : 2021-06-24 , DOI: 10.1016/j.ultramic.2021.113335
Xukang Wei 1 , H Paul Urbach 1 , Peter van der Walle 2 , Wim M J Coene 3
Affiliation  

We present a parameter retrieval method which incorporates prior knowledge about the object into ptychography. The proposed method is applied to two applications: (1) parameter retrieval of small particles from Fourier ptychographic dark field measurements; (2) parameter retrieval of a rectangular structure with real-space ptychography. The influence of Poisson noise is discussed in the second part of the paper. The Cramér Rao Lower Bound in both applications is computed and Monte Carlo analysis is used to verify the calculated lower bound. With the computation results we report the lower bound for various noise levels and analyze the correlation of particles in application 1. For application 2 the correlation of parameters of the rectangular structure is discussed.



中文翻译:

暗场傅立叶 ptychography 中的小粒子参数检索和实空间 ptychography 中的矩形

我们提出了一种参数检索方法,该方法将有关对象的先验知识纳入 ptychography。所提出的方法应用于两个应用:(1)从傅里叶 ptychographic 暗场测量中提取小颗粒的参数;(2) 具有实空间ptychography的矩形结构的参数检索。泊松噪声的影响在论文的第二部分讨论。计算两个应用程序中的 Cramér Rao 下界,并使用蒙特卡罗分析来验证计算出的下界。根据计算结果,我们报告了各种噪声水平的下限,并分析了应用 1 中粒子的相关性。对于应用 2,讨论了矩形结构参数的相关性。

更新日期:2021-07-07
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