Controlling two dimensional doping distributions is an important benefit in order to check processed substrates or specific devices. To achieve this purpose, a new methodology is proposed in order to obtain qualitative maps of acceptor concentration from one EBIC image. Analytical models are used to help in defining the best experimental condition and to check the validity of the approach, and a TCAD simulation is performed on a realistic structure and shows promising results. Then, a measurement is carried out on a device and the epitaxy gradient is clearly visible, as well as the presence of Pwell layers.

中文翻译：

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从 EBIC 实验中提取受体浓度图

控制二维掺杂分布对于检查处理过的衬底或特定器件是一个重要的好处。为了实现这一目的，提出了一种新方法，以便从一个 EBIC 图像中获得受体浓度的定性图。分析模型用于帮助定义最佳实验条件并检查该方法的有效性，并且在真实结构上执行 TCAD 模拟并显示出有希望的结果。然后，在器件上进行测量，外延梯度以及 Pwell 层的存在清晰可见。