ABSTRACT

We propose a facile and combined methodology to develop magnetron sputtered various metals and alloy (e.g. tungsten, tin and nichrome), and metal oxide (indium tin oxide) thin film-based micro-patterns deposited on flexible and rigid substrates utilizing reusable patterned mask. CO₂ laser-cut glass-based mask is fabricated and assembled with the substrates for pattern printing by sputtered thin film deposition technique. Fabrication of mask is adopted with the rapid CO₂ laser-cut process aided with computer-aided design software. The laser-cut glass-based mask can easily fix on any type of substrates and any resistive materials deposition can be carried out. Currently, the developed thin film micro-patterns show good uniformity, dense morphology and without sign of any discontinuity. Finally, a successful functional characterization of a typical nichrome line-heater also confirms the feasibility and proof of concept of the present proposed approach that is much facile, less time-consuming and economical.

摘要

我们提出了一种简便的组合方法来开发磁控溅射各种金属和合金（例如钨、锡和镍铬合金）和金属氧化物（氧化铟锡）薄膜微图案，这些微图案沉积在使用可重复使用的图案化掩模的柔性和刚性基板上。CO ₂激光切割玻璃基掩模是通过溅射薄膜沉积技术制造并与用于图案印刷的基板组装在一起的。采用快速CO ₂制作口罩激光切割过程辅助计算机辅助设计软件。激光切割玻璃基掩模可以轻松固定在任何类型的基板上，并且可以进行任何电阻材料沉积。目前，开发的薄膜微图案表现出良好的均匀性、致密的形态并且没有任何不连续的迹象。最后，一个典型的镍铬合金线路加热器的成功功能表征也证实了本提出的方法的可行性和概念证明，该方法非常容易、耗时和经济。